CHM ENG 179 Study Guide - Midterm Guide: Relative Permittivity, Charge Carrier, Torr

• School: Berkeley
• Department: Chemical & Biomolecular Engineering
• Course: CHM ENG 179
• Professor: all

Document Summary

Power dissipation heats devices, limiting scaling: briefly describe how dopants affect semiconductor conductivity. N-type dopants donate electrons to conduction band; p-type dopants accept electrons, creating free holes. In both cases, mobile charge carrier concentration increases, leading to higher conductivity: sketch the profile of electron and hole density for p-type silicon next to an insulator with a positively biased electrode on the other side. So they can increase gate dielectric film thickness (d) without decreasing capacitance. 1: describe in a few sentences how a phase shift mask works and why it is needed in lithography. Psm work by altering the phase of light electric fields in adjacent features so as to create interference effects that reduce diffraction limitations. D varies as exp (-e/kt); arrhenius form for an activated process; activation energy needed to overcome diffusion barriers in lattice: list 2 current problems with euv lithography. Masks; source intensity; photoresists; defect: a reaction at an interface is first order and irreversible.